VCP Cryopumps

HSR VCP pumps cover the range from DN 100 to DN 200. Pumps of this size are built in a 90° design, meaning the high-vacuum flange is located on the side of the housing. Due to limited space, there are no cold head heaters or heating cartridges provided for these pumps. Regeneration time can be reduced with heating jackets and purge gas.

The housing always consists of two parts for accessibility to the internal components. These two parts are sealed together with O-rings or metal seals.

The right-angled and expanding design generates an increased pumping capacity for the 2nd stage in relation to the inlet area.

Model designation VCP 100 VCP 160 VCP 200
Inlet flange DN 100 ISO-K DN 160 ISO-K DN 200 ISO-K
Forevacuum flange DN 40 ISO-KF DN 25 ISO-KF DN 40 ISO-KF
Pumping speed [l/s]    
Water 1’100 2’600 5’000
Nitrogen 550 1’200 1’800
Argon 400 1’000 1’550
Hydrogen 580 1’500 2’500
Capacity [barl]    
Argon 100 300 700
Nitrogen 100 300 700
Hydrogen 4 10 15