HSR AG, Balzers - Vacuum technology, cryogenics, angle valves, diffusion pumps > Products > UHVPumps
 

UHV pumps

Titanium sublimation pumps

Vaporisation and sublimation getter pumps respectively are effective additional pumps in high vacuum and ultra-high vacuum systems.

 

  • area of application 5 x 10-5 to 10-12 mbar
  • end-pressure in the area to 10-12 mbar in sufficiently heated environments
  • high volume flow rates for chemically active gases via titanium sublimation
  • easily changeable sublimation wires
   
HSR AG
Föhrenweg 16
9496 Balzers
Phone +423 388 09 90
Fax +423 388 09 99
info@hsr.li