UHV pumps
Titanium sublimation pumps
Vaporisation and sublimation getter pumps respectively are effective additional pumps in high vacuum and ultra-high vacuum systems.
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area of application 5 x 10-5 to 10-12 mbar
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end-pressure in the area to 10-12 mbar in sufficiently heated environments
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high volume flow rates for chemically active gases via titanium sublimation
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easily changeable sublimation wires