High vacuum angle and plate valves are implemented as back pressure valve between a high vacuum pump and the vacuum chamber. Operation takes place in most cases electro-pneumatic and the valves are also available with choke-positioning.
HSR AG expanded its product range in May 2008 with the acquisition of the business area high vacuum angle and plate valves from the company INFICON.
This tried and tested technology has been developed further by HSR AG and these products are undergoing continuous improvement to be the benefit of our customers.