Pump Fluids
Typical applications
- Vacuum metallurgy
- Ophthalmic coatings
- Vacuum metallization
- Vacuum tube industry
- Electron beam welding
- Vacuum chemistry, analytics
- Isolation vacuum
Attainable ultimate pressure
The end pressures can be attained with correct conditioning of the high vacuum pumping system.They refer to blanked off groups of pumps with an appropriate pumping fluid / baffle combination. The ultimate pressure values shown may be decreased if the gas sources are further reduced.
Mineral oil 66A
Vapor pressure at 20°C: 4 · 10-8 mbar
Good chemical, oxidative and thermal resistance
Preferred pressure range: 10-7 – 10-3 mbar
End pressure
LN2 cooling < 6 · 10-9 mbar
Machine cooling -20 °C < 6 · 10-8 mbar
Water cooling 20 °C < 4 · 10-7 mbar
Air cooling 25 °C < 1 · 10-6 mbar
Silicon oil HSR 704 EU
Vapor pressure at 20 °C: 2 · 10-8 mbar
Very good chemical, oxidative and thermal resistance
Preferred pressure range: 10-7 – 10-3 mbar
End pressure
LN2 cooling < 6 · 10-9 mbar
Machine cooling -20 °C < 3 · 10-8 mbar
Water cooling 20 °C < 6 · 10-8 mbar
Air cooling 25 °C < 5 · 10-7 mbar
Silicon oil HSR705
Vapor pressure at 25 °C: 3 · 10- 9 mbar
Very good chemical, oxidative and thermal resistance
Preferred pressure range: 10-8 – 10-5 mbar
End pressure
LN2 cooling to 10-11 mbar
Machine cooling -20 °C < 3 · 10-8 mbar
Water cooling 20 °C < 3 · 10-8 mbar
Air cooling 25 °C < 2 · 10-7 mbar
Pentaphenylether SANTOVAC 5
Vapor pressure at 20 °C: 1 · 10-10 mbar
Excellent chemical, oxidative and thermal resistance
Preferred pressure range: 10-8 – 10-3 mbar
End pressure
LN2 cooling < 6 · 10-9 mbar
Machine cooling -20 °C < 3 · 10-8 mbar
Water cooling 20 °C < 3 · 10-8 mbar
Air cooling 25 °C < 2 · 10-7 mbar