HSR AG, Balzers - Vacuum technology, cryogenics, angle valves, diffusion pumps > Products > CryogenicPumps > Accessories

Accessories Cryopumps

Regeneration heater device for cryo pumps


mass produced heater for easy installation outside of the pump housing

Heating Jacket Housing

Purge Gas Heater for quick regeneration

Purge gas inlet device including purge gas heater

Complete device includes:

  • Electrical operated gas inlet valve
  • Heating device including tube connection
  • Adapter DN10KF for connection to pump housing
Purge Gas Heater

Cryo Temperature Measuring System with Sensor

The HSR sensor KTS 100 is characterized by special features such as:

  •     Unbreakable rugged execution

  •     4 – wire system for maximum measurement accuracy

  •     Resistant to high radiation environment

  •     Simple signal processing by linear signal over the entire measuring range



Cryo Temperature Measuring System

Service Adapter Cryo

  •  necessary for Maintenance and Service
  •  to evacuate and vent the Helium in Cryo pump Systems
Service Manifold


Flexible metal hoses in all dimensions.

Föhrenweg 16
9496 Balzers
Phone +423 388 09 90
Fax +423 388 09 99