UHV pumps

Titanium sublimation pumps

Vaporisation and sublimation getter pumps respectively are effective additional pumps in high vacuum and ultra-high vacuum systems.

♦ area of application 5 x 10-5 to 10-12 mbar
♦ end-pressure in the area to 10-12 mbar in sufficiently heated environments
♦ high volume flow rates for chemically active gases via titanium sublimation
♦ easily changeable sublimation wires